The critical role of hydrogen for physical sputtering with Ar–H2 glow discharges

January 20, 2017 By kishore

The critical role of hydrogen for physical sputtering with Ar–H2 glow discharges

Abstract

The physical sputtering of gold surfaces by argon–hydrogen pulsed direct-current glow discharges has been measured for various gas compositions, and an optimum has been found at 5–20% H2.

Furthermore, the energy distributions of the ions hitting the cathodic surface have been measured and correlated to the sputtering rates using known sputtering-yield curves. It was found that the largest contribution to the ion sputtering originated from ArH+, the fluxes and energies of Ar+ being significantly smaller than for ArH+.

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